● Multiple wafers can be irradiated at one time.(for6″frames only)

● Peak wave length：352nm.

● The ozone generation level is also extremely low, and it safe users it.（our measurement results）

● The nitrogen purge, and the air purge is possible .(It is possible to inject it from the device back entrance

● low power consumption .(100W）

● The lighting time is shortened by the inverter method adoption

● Easy operation with LC touch screen, which you can confirm luminance in real time .(IS grade)

● With s safety system ,automatically turn off the lights at over 60 degree C. (at 45 degree C  automatically revert)