Ultra-pure Water Resistivity Controller
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The system make a stable level of resistivity in the ultra-pure water that is came, so there is no electricity effect.
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| ¡öSPECIFICATION | ||
| ¡¡ | unit | standard |
| Manage Flow rate | L/Min | 5¡«36 |
| Resistivity setting rage¡¡ | M¦¸¡¤cm | 0.1¡«Max¡À15%£¨setting£© |
| Water requirements pressure¡¡ | Mpa | 0.1¡«0.35£¨Max.0.45) |
| Water requirements Temperature¡¡ | ¡æ | 5¡«35 |
| Water requirements resistivity | M¦¸¡¤cm | ¡Ý18 |
| CO2 pressure | Mpa | 0.25¡«0.65 |
| CO2 purity¡¡ | % | ¡Ý99.5 |
| Flow rate¡¡ | L/Min | 5¡«50 |
|
Precision
¡¡ |
M¦¸¡¤cm | 0¡«20 |
| Precision | ¡¡ | ¡À1.0%F.S |
| display¡¡ | ¡¡ | LCD |
| Alarm¡¡ | ¡¡ | LED |